PAS Series PAS-XYR Alignment Module

  • Direct drive technology
  • Compact and low profile
  • Low moving mass, fast respond
  • Cross roller bearing for excellent precision and rigidity
  • Stackable configuration
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PAS Series Alignment Module is a low-profile, 3-axis, XYθ motion, compact, miniature stage.
Ideal for closed loop short stroke positioning applications where precision, repeatability, and low speed/force ripple are of utmost importance.
PBA PAS Module is powered by PBA direct drive motors and comes with built-in precision cross roller guides that provide high rigidity to complement the high acceleration capability of the PAS module which has very low electrical/mechanical time constants and zero hysteresis. With the combination of a high-resolution linear encoder, PBA PAS Module ensures high-accuracy positioning operation without any backlash. It is most suitable for alignment processing utilizing image processing such as semiconductor and liquid crystal-related manufacturing equipment, and positioning mechanisms for measuring equipment and inspection instruments that require clean environments.

  • Direct drive technology
  • Compact and low profile
  • Cross roller bearing for excellent precision and rigidity
  • Zero cogging, zero backlash and zero hysteresis
  • Low moving mass, fast response
  • Integrated high-precision linear encoder
  • Excellent reliability
  • Stackable configuration

Suitable Application

  • Alignment process
  • Inspection
  • Pick and Place
  • Dispensing
  • Printing
  • Laser marking


Specification for PAS Series

Details specifications are available at the DOWNLOADS section of this site.

Part Numbering System

PAS Series –  Part Numbering System


The PAS Series Catalogue, 3D Drawings and Linear Motor Sizer Software
are available at the DOWNLOADS section of this site.