XY Clear Aperture Module

  • Automated optical inspection
  • Semiconductor wafer inspection
  • Vision detection

XY Clear Aperture stage is built for high speed and high precision with low settling time. The stage is used for high-precision applications, ranging from two-sided wafer processing where high-dynamics and micrometer-level straightness are required, to quasi-static optical metrology powered by DX B Ironless Linear motors where high-accuracy and precise geometric performance are necessary.


  • Integrated, low-profile XY linear-motor stage with clear aperture
  • Superior geometric performance
  • Optimised for high-dynamic applications
  • Speeds up to 2 m/s and accelerations up to 1G
  • Customisable solutions available