PAS Series PAS-XR Alignment Stage is a low-profile, 2-axis, Xθ motion, compact, miniature stage.
Ideal for closed loop short stroke positioning applications where precision, repeatability and low speed/force ripple are of utmost importance.
PBA PAS stage is powered by PBA direct drive motors comes with built-in precision cross roller guides that provide high rigidity to complement the high acceleration capability of the PAS module which has very low electrical/mechanical time constants and zero hysteresis. With the combination of high-resolution linear encoder, PBA PAS Stage ensures high-accuracy positioning operation without any backlash. It is most suitable for alignment processing utilizing image processing such as semiconductor and liquid crystal related manufacturing equipment, and positioning mechanism for measuring equipment and inspection instruments that require clean environments.
- Direct drive technology
- Compact and low profile
- Cross roller bearing for excellent precision and rigidity
- Zero cogging, zero-backlash and zero hysteresis
- Low moving mass, fast response
- Integrated high precision linear encoder
- Excellent reliability
- Stackable configuration
- Alignment process
- Pick and Place
- Laser marking