XY Clear Aperture stage is built for high speed and high precision with low settling time. The stage is used for high-precision applications, ranging from two-sided wafer processing where high-dynamics and micrometer-level straightness are required, to quasi-static optical metrology powered by DX B Ironless Linear motors where high-accuracy and precise geometric performance are necessary.
XY Clear Aperture Stage
- Integrated, low-profile, XY, linear-motor stage with clear aperture
- Excellent geometric performance
- Optimised for high-dynamic applications
- Speeds to 2 m/s and accelerations to 1G
- Customised solutions available
