XY Theta stage with Clear Aperture

  • Automated optical inspection
  • Semiconductor wafer inspection
  • Vision detection

PBA XY Theta Clear Aperture High Precision Stage offers a large clear aperture, high dynamics and exceptional geometric performance in a compact, low-profile package.

PBA XY Theta Clear Aperture High Precision Stage can be applied on applications, ranging from two-sided wafer processing where high dynamics and micrometre-level straightness are required, to quasi-static optical metrology powered by DX B, ARC Ironless Motors where high accuracy and precise geometric performance are necessary.



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