Co-Planar XY Theta Air Bearing Nano Precision Gantry with Z axis

  • Ideal for wafer scribing application
    Glass substrate exposure
    Wafer defect detection equipment

PBA Co-Planar XY Theta Air Bearing Nano Precision Gantry with Z axis uses PBA ironless linear motor. Zero cogging features help to lower the setting time, which provides excellent smooth motion and positioning accuracy.